MEMS Devices

Latest Innovations

Fabrication of Microfluidic Systems and Components Using Light Initiated Polymerization

 

An innovative, cost-effective method for making and integrating fluidic microchannels. This method for ultra-rapid prototyping of microfluidic systems requiring...

Balanced Cantilever RF MEM Switch

 

A high life cycle and low voltage MEMS device. Separate support posts are disposed to prevent a suspended switch pad from touching the actuation pad while...

In-Situ Simultaneous Actuation and Displacement Sensing with Electrostatic Actuators Using Amplitude and/or Phase Modulation

 

An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent...

Low Actuation Voltage Microelectromechanical (MEM) RF Devices

 

A method and apparatus for controlling the flow of signals by selectively switching signals to ground and allowing signals to pass through a signal line based a...

Signal Routing in Balanced Cantilever RF MEM Switch

 

A high life cycle MEMS device. The inventors have recognized that the deflection beam or deflection beams of an MEMS shunt switch are a failure point in need of...

Parallel-Kinematics Flexure Stage (PKFS)

 

This parallel-kinematics flexure stage (PKFS) generates a motion range larger than, or at least comparable to, current commercial designs while simultaneously...

Broadband, Electrically-Small Antenna

 

The utilization of small antennas for mobile devices and for low frequency (long wavelength) applications is desired. Further, efficient use of transmission power...

High Precision Silicon-on-Insulator (SOI) MEMS Parallel Kinematics Stages

 

MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably...

Optical Control of MEMS Devices Utilizing Photovoltaic Diode

 

An electromagnetic energy, e.g., visible light, controlled low actuation voltage MEMS switch. Stimulation of photovoltaic diodes causes a switching that controls...

Highly Efficient Microcooling/Heating Device

 

A compact active vapor compression cycle heat transfer device. The device of the invention includes a flexible diaphragm serving as the compressive member in a...

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